宸茬粡琚?簡,浠ヤ笅鏄?缁嗕俊鎭?細
Accession number:20133516668765
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Title:The application and research of fault detection based on PC-KNN in semiconductor batch process
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Authors:Zhang,Cheng1; x05x05x05x05 Li,Yuan1 x05x05x05x05x05x05x05
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Author affiliation:1x05x05x05x05x05x05 Shen Yang University of Chemical Technology,Shen Yang 110142,Chinax05x05x05x05x05
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Source title:2013 25th Chinese Control and Decision Conference,CCDC 2013
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Abbreviated source title:Chin.Control Decis.Conf.,CCDC
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Monograph title:2013 25th Chinese Control and Decision Conference,CCDC 2013
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Issue date:2013
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Publication year:2013
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Pages:4209-4214
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Article number:6561690
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Language:Chinese
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ISBN-13:x05x05x059781467355322x05x05 x05x05
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Document type:Conference article (CA)
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Conference name:2013 25th Chinese Control and Decision Conference,CCDC 2013
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Conference date:May 25,2013 - May 27,2013
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Conference location:Guiyang,China
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Conference code:x05x05x0598686x05x05 x05x05
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Publisher:IEEE Computer Society,2001 L Street N.W.,Suite 700,Washington,DC 20036-4928,United States
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Abstract:In this paper,PC-KNN is studied on the condition that the data dimension is reduced by PCA.FD-KNN (Fault Detection based on K - Nearest - Neighbor) has been applied in semiconductor manufacturing Fault Detection,it can handle nonlinear and multi modal testing problems that influence the performance of PCA.The computational complexity and higher requirement of time and storage space have become the major factors which influence performance of FD-KNN.First,PCA is used to reduce the dimension of original data,then FD-KNN method is applied in principal space,it can effectively reduce the complexity of the calculation and the requirements of system resources process.Through the application in semiconductor batch production process,the results show the performance of PC-KNN dealing with nonlinear and multimodal,it demonstrate the effectiveness of the method proposed in this paper.© 2013 IEEE.
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Number of references:22
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Main heading:Fault detection
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Controlled terms:Batch data processing - Digital storage - Finite difference method - Modal analysis - Principal component analysis - Semiconductor device manufacture
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Uncontrolled terms:Batch process - Batch production process - Data dimensions - K-nearest neighbors - Major factors - Semiconductor manufacturing - Storage spaces - System resources
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Classification code:922.2 Mathematical Statistics - 921.6 Numerical Methods - 921 Mathematics - 723.2 Data Processing and Image Processing - 722.1 Data Storage,Equipment and Techniques - 714.2 Semiconductor Devices and Integrated Circuits - 422 Strength of Building Materials; Test Equipment and Methods
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DOI:10.1109/CCDC.2013.6561690
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